helium leak testing vacuum chamber is the most accurate and efficient of all tracer gas leak detection systems and is used to test parts with extremely low leak rates. It offers better repeatability than other tracer gas leak detection methods, offers shorter cycle times, and is less sensitive to temperature and other external environmental factors. Other benefits include fast cycle time and high repeatability.

The helium vacuum leak test can be performed using the "in-out" or "out-in" method.
TM Electronics' TME solution can perform a variety of flow and leak tests including burst, shut-off, vacuum drop, pressure drop, crack, differential pressure and differential vacuum. The device provides a resolution of 0.0001 psi per second.

The device can be equipped with up to four ports and double switching is available to maximize productivity. The touch screen menu system allows easy entry and storage of 100 related programs, with data storage for 5000 test results. Real-time statistical analysis and quality control charts are available upon request.
The system is equipped with a color screen with two remote control boxes with buttons and light sensors for the operators. The system has separate exit ports for helium and air and can be connected to a helium recovery system. With the UL6000 Fab, INFICON GmbH, one of the world's leading manufacturers of leak testing equipment and instruments, has launched the latest generation of mobile leak detectors for high-volume production lines in the semiconductor industry. INFICON developed this portable device for use in semiconductor chip manufacturing and production lines for solar cells, flat panel displays, glass and plastic film coatings, and general vacuum systems. Like its predecessor, the UL5000, the new device also uses the vacuum method with helium as the tracer gas.

The Helium Mass Spectrometer Air Tightness Detetion moves helium at over 36 liters per second. This extremely high helium pumping rate means that the device
reacts extremely fast with very short signal rise and fall times. A high-performance Roots pump with an air pumping capacity of 36 m³ per hour acts as a pre-vacuum pump for mass evacuation. The sensitivity of the UL6000 Fab is also unmatched: it detects even the smallest leaks down to 5∙10-12 mbar∙l/s completely reliably. All this makes the UL6000 Fab the fastest and most sensitive leak test system on the market. For semiconductor manufacturers, for example, the new leak detector pays for itself quickly by reducing valuable equipment downtime.

The innovative turbomolecular pump UL6000 Fab Booster combines speed and precision. It pumps helium at 36 liters per second and guarantees a minimum response time and an immediate purge of the helium tracer gas. The device uses a Roots pump as the primary pump, which ensures a minimum evacuation time with a maximum air pump speed of 36 m³/h. It maintains the highest air pump speed over a wide range of pressure, especially the primary vacuum, something that other Roots pumps can only do at their optimum pressure. This provides a time saving of several minutes per test, especially for larger production tools with volumes between 50 and 1000 liters or more. Designed specifically for INFICON, the Roots pump also requires little maintenance, has a very long life and can handle a high steam load. The UL6000 Fab is equipped with a connection for a connection blow DN63, which allows the maximum effective helium pump speed to be applied to the element under test largely without limitation. This also increases the strength of the flow signal, the signal response and decay are also accelerated. A DN40 adapter ensures that smaller diameters can also be processed as usual, albeit with a slight reduction in the helium pump speed.

Helium Leak Detection for New Energy Industry  is standard for data acquisition and remote parameter control, but an Ethernet connection is available to allow instrument data transmission over a local network. The instrument provides CFR Part 11 data protection and conforms to ASTM and ISO-11607 guidelines. Calibration is NIST traceable.

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